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1
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國立臺北科技大學自有儀器共同使用計畫
NTUT Instrument Center
| Cold Field-Emission Scanning Electron Microscopy ( HITACHI Regulus-8100 ) | NTUT Instrument Center | 冷場發掃描式電子顯微鏡 （Cold Field-Emission Scanning Electron Microscopy；FE-SEM）
廠牌：HITACHI
型號：Regulus 8100
主要功能：表面觀察及搭配能量分散光譜儀(EDS)元素分析
重要規格
電子源：Cold-cathode field emission source 冷場發射電子源
放大倍率：
LM mode : 20 to 2,000 x
HM mode : 100 to 1,000,000 x
二次電子影像解析度：
0.7 nm guaranteed (accelerating voltage: 15kV)
0.8 nm guaranteed (accelerating voltage: 1kV) |
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Instrument Chinese Name
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【EM012900】冷場發掃描式電子顯微鏡 ( HITACHI Regulus-8100 )
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【EM012900】冷場發掃描式電子顯微鏡 ( HITACHI Regulus-8100 )
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Instrument English Name
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Cold Field-Emission Scanning Electron Microscopy ( HITACHI Regulus-8100 )
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Instrument Category
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Electron Microscope
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Instrument Status
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服務(On Service)
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Number of Reservations
(within a month)
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Number of Reservations(Internal):0
Number of Reservations(external):0
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Billing Trial Calculation
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2
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國立臺北科技大學自有儀器共同使用計畫
NTUT Instrument Center
| Electron Spectroscopy for Chemical Analysis | NTUT Instrument Center | Specifications:
X-ray source: MgKα, AlKα
Monochoromattic X-ray source: AlKα
Etching ion source: Ar+, Etching area: diameter ~10 mm
Samples:
1. bulk and thinfilm: diameter 6~10 mm, thickness<2 mm
2. maxium 6 samples per holder, 3 samples when auto etching
(powders won't accept unless prepared on Si wafer or In foil)
Notice:
1. no liquid, powders, toxic, radioactivity, corrosivity samples
2. if samples can not vacuum will charge the basic fee
3. depth profile sputtering time should less than 3.5 hrs(600V etch SiO2 40nm/min)
Test Items
1. Quantitative and qualitative
2. Depth profile |
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Instrument Chinese Name
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【ESCA001700】化學分析電子能譜儀
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【ESCA001700】化學分析電子能譜儀
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Instrument English Name
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Electron Spectroscopy for Chemical Analysis
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Instrument Category
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Electron spectrometer
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Instrument Status
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服務(On Service)
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Number of Reservations
(within a month)
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Number of Reservations(Internal):0
Number of Reservations(external):1
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Billing Trial Calculation
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3
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國立臺北科技大學自有儀器共同使用計畫
NTUT Instrument Center
| Field Emission Scanning Electron Microscope(JEOL-JSM7610F) | NTUT Instrument Center | 高解析熱場發射掃描式電子顯微鏡(FE-SEM)
廠牌： JEOL
型號：JSM-7610F
重要規格
加速電壓：0.1kV ~ 30kV
電子光源：In-lens Schottky Field Emission Electron Gun
放大倍率：x 10 ~ x 1000k
SEI 解析度：1.0 nm（at 15kV）、 1.3 nm（at 1kV）
自動功能：對焦、像差修正、明亮、對比。 |
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Instrument Chinese Name
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【EM011700】場發射掃描式電子顯微鏡(JEOL-JSM7610F)
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【EM011700】場發射掃描式電子顯微鏡(JEOL-JSM7610F)
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Instrument English Name
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Field Emission Scanning Electron Microscope(JEOL-JSM7610F)
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Instrument Category
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Electron Microscope
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Instrument Status
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服務(On Service)
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Number of Reservations
(within a month)
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Number of Reservations(Internal):0
Number of Reservations(external):0
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Billing Trial Calculation
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| Basic | 113 | Pt coating |
| Pt coating | 200 | 200 | 200 | 200 | No discount |
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| Basic | 113 | SEM |
| SEM | 1,200 | 2,400 | 1,000 | 2,000 | No discount |
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| Basic | 113 | EDS |
| EDS | 1,500 | 3,000 | 1,200 | 2,400 | No discount |
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| Basic | 113 | BEI |
| BEI | 1,500 | 3,000 | 1,200 | 2,400 | No discount |
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| Basic | 113 | CD |
| CD | 100 | 10 | 100 | 100 | No discount |
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4
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國立臺北科技大學自有儀器共同使用計畫
NTUT Instrument Center
| SEM ZEISS ∑IGMA Essential | NTUT Instrument Center | 為減少儀器不必要的污染，本機台對於檢驗樣品的限制如下：
1.試片不得為含有毒性、腐蝕性、揮發性、水分、低熔點、磁性及有機高分子材料。
2.試片之製作由使用者自理。
3.試片需乾燥，在真空中無揮發性。
4.在電子束照射下會分解或釋放氣體之樣品，因有礙真空維持，恕不受理。
5.若無告知而導致機台汙染故障，得負責支付維修之費用。
6.預約成功未送件處罰停權一個月
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Instrument Chinese Name
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【EM024600】場發射掃描式電子顯微鏡
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【EM024600】場發射掃描式電子顯微鏡
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Instrument English Name
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SEM ZEISS ∑IGMA Essential
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Instrument Category
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Electron Microscope
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Instrument Status
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服務(On Service)
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Number of Reservations
(within a month)
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Number of Reservations(Internal):0
Number of Reservations(external):0
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Billing Trial Calculation
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